Freshly Printed - allow 7 days lead
Couldn't load pickup availability
Vacuum Microelectronics
Wei Zhu (Edited by), w Zhu (Author)
9780471322443, Wiley
Hardback, published 12 October 2001
416 pages
24.5 x 16.2 x 2.5 cm, 0.705 kg
Die ständig steigenden Anforderungen an die Mikroelektronik lassen sich zum Teil mit Hilfe von Vakuumtechnologien bewältigen: Im Vakuum kann man Bauelemente schneller, mit größerer Reinheit und zuverlässiger herstellen und zusammenfügen. Anwendungsgebiete reichen von der Herstellung integrierter Schaltkreise bis zu neuen Anzeigegeräten. Das erste Buch zu einem schnell wachsenden Forschungsgebiet!
Preface ix List of Contributors xiii 1. Historical Overview 1 1.1 Introduction 1 1.2 Shoulders’ Proposal 1 1.3 Groundbreaking Work 2 1.4 Invention of Spindt Cathode 4 1.5 Field Emitter Arrays 5 1.6 New Cathode Materials 6 1.7 Future 7 Dedication 9 References 9 2 Technological Overview 13 2.1 Introduction 13 2.2 Promise and Reality 14 2.3 Case Studies 15 2.4 Outlook 30 References 31 3 Theory of Field Emission 33 3.1 Introduction 33 3.2 One-Dimensional Tunneling Theory: Metals 35 3.3 Emission from Multi-Dimensional Structures 69 3.4 Conclusion 97 Acknowledgments 98 References 98 4 Spindt Field Emitter Arrays 105 4.1 Introduction 105 4.2 A Brief History of the Spindt Cathode 106 4.3 Fabrication Technology 108 4.4 Performance 141 4.5 Applications and Ongoing Developments 179 4.6 Summary 181 Acknowledgments 181 References 182 5 Silicon Field Emitter Arrays 187 5.1 Introduction 187 5.2 Fabrication of Silicon FEAs 190 5.3 Free Electron Theory of Field Emission 199 5.4 Emission Characterization of Silicon FEAs 205 5.5 Local Circuit Elements 224 5.6 Summary 241 Dedication 242 References 242 6 Novel Cold Cathode Materials 247 6.1 Introduction 247 6.2 Diamond Emitters 248 6.3 Carbon Nanotube Emitters 265 6.4 Other Cold Cathodes 274 6.5 Conclusion 280 References 280 7 Field Emission Flat Panel Displays 289 7.1 Introduction 289 7.2 Field Emission Displays 290 7.3 Other Display Technologies 334 7.4 Summary 341 Institutions Involved inFEDCommercialization 342 Acknowledgments 343 References 343 8 Cold Cathode Microwave Devices 349 8.1 Introduction 349 8.2 Microwave Amplifiers 350 8.3 Field Emitter Arrays 355 8.4 Characteristics of FEA-Cathode Microwave Tubes 381 8.5 Future Work 385 References 386 Index 393
Takao Utsumi
Gregory P. Kochanski, Wei Zhu, and Yehuda Goren
Kevin L. Jensen
Charles A. (Capp) Spindt, Ivor Brodie, Christopher E. Holland and Paul R. Schwoebel
Jonathan Shaw and Junji Itoh
Wei Zhu, Peter K. Baumann, and Christopher A. Bower
Heinz H. Busta
R. Allen Murphy and Mary Anne Kodis
Subject Areas: Electronics & communications engineering [TJ]
