Thin Film Shape Memory Alloys
Fundamentals and Device Applications

The first dedicated book describing the properties, preparation, characterization and device applications of TiNi-based shape memory alloys.

Shuichi Miyazaki (Edited by), Yong Qing Fu (Edited by), Wei Min Huang (Edited by)

9780521885768, Cambridge University Press

Hardback, published 3 September 2009

486 pages, 106 b/w illus. 14 tables
25.4 x 18 x 2.7 cm, 1.1 kg

This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition, characterization, post treatment, and applying thin films to practical situations, appeal to more informed readers. Each chapter is written by expert authors, providing an overview of each topic and summarizing all the latest developments, making this an ideal reference for practitioners and researchers alike.

Part I. Introduction S. Miyazaki, Y. Q. Fu and W. M. Huang
Part II. Technologies: 1. Overview of shape memory alloys and thin films S. Miyazaki, Y. Q. Fu and W. M. Huang
2. Martensitic transformation S. Miyazaki
3. Deposition techniques for TiNi films A. D. Johnson
4. Ti/Ni multilayer thin films H. Cho and S. Miyazaki
5. Film microstructure and crystallization A. G. Ramirez, X. Huang and H. J. Lee
6. Mechanical properties A. Ishida
7. Stress, texture, wrinkling and relief Y. Q. Fu, W. M. Huang, M. D. Cai and S. Zhang
8. Ion irradiation T. LaGrange and R. Gotthardt
9. Laser post annealing and theory W. M. Huang and M. H. Hong
Part III. Applications: 10. Overview of applications A. D. Johnson
11. Theory on shape memory microactuator Y. C. Shu
12. Binary and ternary alloy film diaphragm microactuators S. Miyazaki, M. Tomozawa and H. Y. Kim
13. Microactuator applications K. P. Mohanchandra and G. Carman
14. Microvalves M. Kohl
15. Superelastic thin films and applications for medical devices C. Zamponi, R. L. De Miranda and E. Quandt
16. Sputter-deposited Ti-Ni superelastic microtubes P. J. Buenconsejo, H. Y. Kim and S. Miyazaki
17. Microcage-biopsy applications Y. Q. Fu, J. Luo, S. E. Ong and S. Zhang
18. Shape memory thin film composite microactuators E. Quandt
19. Micromirror application Y. Q. Fu, W. M. Huang and C. Y. Chung.

Subject Areas: Semi-conductors & super-conductors [TJFD5], Electronic devices & materials [TJFD], Electronics & communications engineering [TJ], Materials science [TGM], Mechanical engineering & materials [TG]