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Surfaces, Interfaces, and Films for Microelectronics

Eugene A. Irene (Author)

9780470174470, Wiley

Hardback, published 11 March 2008

536 pages
24.1 x 16.3 x 3.2 cm, 0.885 kg

The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.

Preface.

Part I: Fundamentals of Surfaces and Interfaces.

1. Introduction to Surfaces.

2. Structure of Surfaces.

3. Thermodynamics of Surfaces and Interfaces.

4. Surface Roughness.

5. Surface electronic States.

6. Other Surface Probes.

7. Charged Surfaces.

8.Adsorption.

9. Elliposometry and Optical Properties of Surfaces, Interfaces, and Films.

Part II: Microelectronics Applications.

10. Films and Interfaces.

11. Electronic Passivation of Semiconductor-Dielectric Film Interfaces.

12. The Si-SiO2 Interface and Other MOSFET Interfaces.

Index.

Subject Areas: Mechanical engineering & materials [TG]
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