Physics of Radio-Frequency Plasmas

Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.

Pascal Chabert (Author), Nicholas Braithwaite (Author)

9780521763004, Cambridge University Press

Hardback, published 24 February 2011

394 pages, 156 b/w illus. 144 exercises
25.3 x 18 x 2.1 cm, 0.94 kg

"Chabert and Braithwaite have produced an excellent guide to the diversity of RF powered plasmas, as used for many technological processes. The value of combining experiment and theory is well demonstrated. They have given explanations of plasma behavior that will suffice for many readers’ purposes but that also provide a clear introduction to more difficult plasma conditions as the subject develops further complexities."
John I.B. Wilson in Contemporary Physics

Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.

1. Introduction
2. Plasma dynamics and equilibrium
3. Bounded plasmas
4. Radiofrequency sheaths
5. Single frequency capacitively-coupled plasmas
6. Multi-frequency capacitively-coupled plasmas
7. Inductively-coupled plasmas
8. Helicon plasmas
9. Real plasmas
10. Electrical measurements
Index.

Subject Areas: Physics [PH], Mathematics & science [P]