Microelectromechanical Systems — Materials and Devices: Volume 1052

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

David A. LaVan (Edited by), Mark G. da Silva (Edited by), S. Mark Spearing (Edited by), Srikar Vengallatore (Edited by)

9781558999909, Cambridge University Press

Hardback, published 17 March 2008

325 pages
23.5 x 16 x 2.5 cm, 0.63 kg

This book is part of a popular series on the materials science of MEMS devices. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there remains a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.

Preface
Part I. Micromechanics I
Part II. Micromechanics II
Part III. Poster Session
Part IV. MEMS Devices I
Part V. MEMS Devices II
Part VI. Poster Session: MEMS
Part VII. MEMS Materials and Processes I
Part VIII. MEMS Materials and Processes II
Part IX. Select Paper from Symposium N
Author index
Subject index.

Subject Areas: Electronics engineering [TJF], Materials science [TGM]