Microelectromechanical Systems - Materials and Devices IV: Volume 1299

Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', focused on micro- and nanoelectromechanical systems (MEMS/NEMS).

Frank W. DelRio (Edited by), Maarten P. de Boer (Edited by), Christoph Eberl (Edited by), Evgeni Gusev (Edited by)

9781107406834, Cambridge University Press

Paperback / softback, published 5 June 2014

220 pages, 143 b/w illus. 12 tables
22.9 x 15.2 x 1.2 cm, 0.3 kg

Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', held November 29–December 3 at the 2010 MRS Fall Meeting in Boston, Massachusetts, focused on micro- and nanoelectromechanical systems (MEMS/NEMS), technologies which were spawned from the fabrication and integration of small-scale mechanical, electrical, thermal, magnetic, fluidic and optical sensors and actuators with micro-electronic components. MEMS and NEMS have enabled performance enhancements and manufacturing cost reductions in a number of applications, including optical displays, acceleration sensing, radio-frequency switching, drug delivery, chemical detection and power generation and storage. Although originally based on silicon microelectronics, the reach of MEMS and NEMS has extended well beyond traditional engineering materials and now includes nanomaterials (nanotubes, nanowires, nanoparticles), smart materials (piezoelectric and ferroelectric materials, shape memory alloys, pH-sensitive polymers), metamaterials and biomaterials (ceramic, metallic, polymeric, composite-based implant materials). While these new materials provide more freedom with regards to the design space of MEMS and NEMS, they also introduce a number of new fabrication and characterization challenges not previously encountered with silicon-based technology.

Part I. Material Development and Optimization: 1. Biodegradable microfluidic scaffolds with tunable degradation properties from amino alcohol-based poly(ester amide) elastomers Jane Wang
2. Measurements of resonance frequency of parylene microspring arrays using atomic force microscopy Churamani Gaire
3. Gold in flux-less bonding: noble or not noble Marco Balucani
4. Giant piezoresistive variation of metal particles dispersed in PDMS matrix Stefano Stassi
5. Characterization of Group III-nitride based surface acoustic wave devices for high temperature applications J. Justice
6. Transport model for microfluidic device for cell culture and tissue development Niraj Inamdar
7. Refractive index memory effect of ferroelectric materials by domain control Kazuhiko Inoue
8. Synthesis and control of ZnS nanodots and nanorods with different crystalline structure from an identical raw material solution and the excitonic UV emission Masato Uehara
9. Improving PZT thin film texture through Pt metallization and seed layers Luz Sanchez
Part II. Process Integration: 10. Patterning nanomaterials on fragile micromachined structures using electron beam lithography Srikar Vengallatore
11. Pt/TiO2 growth templates for enhanced PZT films and MEMS devices Daniel Potrepka
12. Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210°C Joumana El-Rifai
13. PZT thick films for 100 MHz ultrasonic transducers fabricated using chemical solution deposition process Naoto Kochi
14. Reliability and stability of thin-film amorphous silicon MEMS on glass substrates Pedro Sousa
15. High yield polymer MEMS process for CMOS/MEMS integration V. Seena
16. Characterization of textured PZT thin films prepared by sol-gel method onto stainless steel substrates Xuelian Zhao
Part III. Micro- and Nanosensors: 17. A picowatt energy harvester Joseph Evans
18. Mechanical and material characterization of bilayer microcantilever-based IR detectors Xin Zhang
19. Film conductivity controlled variation of the amplitude distribution of high-temperature resonators Silja Schmidtchen
20. Ultrafine silicon nano-wall hollow needles and applications in inclination sensor and gas transport Zeinab Sanaee
21. Development of a robust design for wet etched co-integrated pressure sensor systems Reinhart Job
22. SU8/modified MWNT composite for piezoresistive sensor application V. Seena
23. Thin film amorphous silicon bulk-mode disk resonators fabricated on glass substrates Alexandra Gualdino
24. Fabrication and characterization of MEMS-based structures from a bio-inspired, chemo-responsive polymer nanocomposite Allison Hess
Part IV. Material and Device Reliability: 25. Characterizing the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures Enrique Escobedo-Cousin
26. Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing Reiko Hiruta
27. Characterisation of hydrophobic forces in liquid self assembly of micron sized functional building blocks Maurizio Gullo
28. Nanoindentation characterization of PECVD silicon nitride on silicon subjected to mechanical fatigue loading Kuo-Shen Chen
29. Effect of phosphorus doping on the Young's modulus and stress of polysilicon thin films Elena Bassiachvili
30. Residual stress in sputtered silicon oxycarbide thin films Xin Zhang
31. Solid bridging during pattern collapse (stiction) studied on silicon nanoparticles Daniel Peter
32. Fabrication and characterization of two compliant electrical contacts for MEMS: gallium microdroplets and carbon nanotube turfs Yoonkap Kim.

Subject Areas: Materials science [TGM]