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Micro and Smart Systems
Technology and Modeling
G. K. Ananthasuresh (Author), K. J. Vinoy (Author), S. Gopalakrishnan (Author), K. N. Bhat (Author), V. K. Aatre (Author)
9780470919392, Wiley
Hardback, published 9 March 2012
496 pages
25.4 x 17.5 x 2 cm, 0.816 kg
Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.
About The Authors Preface Acknowledgments Chapter 1 Introduction Chapter 2 Micro Sensors, Actuators, Systems And Smart Materials: An Overview Chapter 3 Micromachining Technologies Chapter 4 Mechanics Of Slender Solids In Microsystems Chapter 5 Finite Element Method Chapter 6 Modeling Of Coupled Electromechanical Systems Chapter 7 Electronics Circuits And Control For Micro And Smart Systems Chapter 8 Integration Of Micro And Smart Systems Chapter 9 Scaling Effects In Microsystems Chapter 10 Simulation Of Microsystems Using Fea Software Acronyms Notation Glossary Appendix Index
Subject Areas: Electronics & communications engineering [TJ]
