Materials Reliability Issues in Microelectronics: Volume 225

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

James R. Lloyd (Edited by), Frederick G. Yost (Edited by), Paul S. Ho (Edited by)

9781558991194, Cambridge University Press

Hardback, published 22 October 1991

382 pages
23.5 x 15.5 x 2.5 cm, 0.7 kg

With the increased complexity of modern integrated circuits, it is important that reliability problems be attacked properly with the appropriate tools. This volume recognizes that almost all reliability problems are materials problems, and helps to put 'reliabilty physics' on a firm scientific foundation. Topics include: electromigration; stress effects on reliability; stress and packaging; metallization; device, oxide and dielectric reliability; new investigative techniques; corrosion.

Subject Areas: Materials science [TGM]