Integrated Circuit Fabrication
Science and Technology

Master fundamental technologies for modern semiconductor integrated circuits with this definitive color textbook.

James D. Plummer (Author), Peter B. Griffin (Author)

9781009303583, Cambridge University Press

Hardback, published 16 November 2023

678 pages
26.1 x 20.7 x 3.7 cm, 1.77 kg

'A timely and resourceful edition that addresses semiconductor talent development in the coming years. More than 100 of my undergraduate and graduate students have found this text an enriching resource for expanding their understanding about semiconductor processes.' Muhammad Hussain, Purdue University

Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook. It includes an early introduction of a state-of-the-art CMOS process flow, exposes students to big-picture thinking from the outset, and encourages a practical integration mindset. Extensive use of process and TCAD simulation, using industry tools such as Silvaco Athena and Victory Process, provides students with deeper insight into physical principles, and prepares them for applying these tools in a real-world setting. Accessible framing assumes only a basic background in chemistry, physics and mathematics, providing a gentle introduction for students from a wide range of backgrounds; and over 450 figures (many in color), and more than 280 end-of-chapter problems, will support and cement student understanding. Accompanied by lecture slides and solutions for instructors, this is the ideal introduction to semiconductor technology for senior undergraduate and graduate students in electrical engineering, materials science and physics, and for semiconductor engineering professionals seeking an authoritative introductory reference.

1. Historical Perspective, Moore's Law and Future Technology Prospects
2. Modern CMOS Technology
3. Semiconductor Materials = Crystal Growth, Wafer Preparation and Material Properties
4. Semiconductor Manufacturing – Clean Rooms, Wafer Cleaning, Gettering and Chip Yield
5. Lithography
6. Semiconductor/Insulator Interfaces
7. Doping in Semiconductors
8. Ion Implantation
9. Etching Technologies and Chemical-Mechanical Polishing
10. Deposition Technologies
11. Backend (Interconnect) Processing Technologies.

Subject Areas: Nanotechnology [TBN]