• Handbook of Sputter Deposition Technology; Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS (Hardback) 9781437734836
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Handbook of Sputter Deposition Technology
Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

Handbook of Sputtering Technology provides a practical and theoretical overview of sputter deposition technology, a coating technology widely used in the automotive, medical, semiconductors, space, plastics, and military industries

Kiyotaka Wasa (Author)

9781437734836, Elsevier Science

Hardback, published 26 October 2012

660 pages
22.9 x 15.1 x 3.5 cm, 1.03 kg

This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems.

Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.

Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.

  1. Thin Film and Nano-materials

  2. Thin Film and Nanomaterial Processes

  3. Sputtering Phenomena

  4. Computer Simulation of Sputtering

  5. Sputtering Systems

  6. Deposition of Compound Thin Films

  7. Nanometer Materials and Devices

  8. Microfabrications

Subject Areas: Electronic devices & materials [TJFD], Materials science [TGM]
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