• Fundamental Principles of Optical Lithography – The Science of Microfabrication (Paperback / softback) 9780470727300
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Fundamental Principles of Optical Lithography – The Science of Microfabrication

CA Mack (Author)

9780470727300

Paperback / softback, published 16 November 2007

534 pages
24.4 x 17 x 2.8 cm, 0.892 kg

Subject Areas: Physics [PH]
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