Electron Microprobe Analysis

1993 paperback of successful physics monograph on electron microprobe analysis, a widely used technique.

S. J. B. Reed (Author)

9780521599443, Cambridge University Press

Paperback, published 10 July 1997

350 pages
22.9 x 15.2 x 2 cm, 0.475 kg

' … well produced and authoritative, it really is indispensable for microanalysts'. Ultramicroscopy

This 1993 book gives a comprehensive account of both experimental and theoretical aspects of electron microprobe analysis, and is an extensively updated version of the seminal first edition, published in 1975. The design and operation of the instrument, including the electron column and both wavelength- and energy-dispersive X-ray spectrometers, are covered in the first part of the book. Experimental procedures for qualitative and quantitative analysis, using both types of spectrometer, are then discussed. Matrix ('ZAF') corrections, as required for quantitative analysis, are treated in some detail from both theoretical and practical viewpoints. Special considerations applying to the analysis of 'light' elements (atomic number below 10) are covered in a separate chapter. The emphasis throughout is on a sound understanding of principles and the treatment is applicable equally to the electron microprobe in its 'classical' form and to scanning electron microscopes fitted with X-ray spectrometers.

1. Introduction
2. Essential features of the electron microprobe
3. Electron gun
4. The probe-forming system
5. Scanning
6. Wavelength-dispersive spectrometers
7. Proportional counters
8. Counting electronics
9. Lithium-drifted silicon detectors
10. Electronics for energy-dispersive systems
11. Wavelength-dispersive analysis
12. Energy-dispersive analysis
13. X-ray generation and stopping power
14. Electron backscattering
15. Absorption corrections
16. Fluorescence corrections
17. Matrix corrections in practice
18. Light element analysis
Appendix: origin of characteristic X-rays.

Subject Areas: Electronic devices & materials [TJFD], Spectrum analysis, spectrochemistry, mass spectrometry [PNFS], Microscopy [PDND]