Electromechanics and MEMS

A comprehensive MEMS textbook, with worked examples and numerous homework problems.

Thomas B. Jones (Author), Nenad G. Nenadic (Author)

9780521764834, Cambridge University Press

Hardback, published 2 May 2013

577 pages, 345 b/w illus. 20 tables 120 exercises
25.3 x 17.8 x 3 cm, 1.3 kg

'Having designed and built MEMS for many years, I have come to appreciate a clear well-written book on the subject. The treatment by Jones and Nenadic is excellent. MEMS is a field of many specialties requiring knowledge of fabrication, electrostatics, mechanics, noise and circuits. The authors provide broad coverage of these topics, and thus allow students to understand how these systems fit together. The details on electrostatics and mechanics are rich and there are numerous examples which motivate these topics. The writing style is clear and approachable; light-hearted when possible and diligent when necessary. Ultimately, the text serves to sufficiently train the reader in the design trade-offs inherent in MEMS design. I am glad to see this new text and expect it to be a valuable resource for years to come.' Kevin A. Shaw, Sensor Platforms, Inc.

Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.

1. Introduction
2. Circuit-based modeling
3. Capacitive lumped parameter electromechanics
4. Small-signal capacitive electromechanical systems
5. Capacitive sensing and resonant drive circuits
6. Distributed 1-D and 2-D electromechanical structures
7. Practical MEMS devices
8. Electromechanics of piezoelectric elements
9. Electromechanics of magnetic MEMS devices
A. Review of quasistatic electromagnetics
B. Review of mechanical resonators
C. Micromachining
D. A brief review of solid mechanics.

Subject Areas: Electronics & communications engineering [TJ], Electrical engineering [THR], Materials science [TGM], Mechanical engineering [TGB], Mechanical engineering & materials [TG], Chemical engineering [TDCB], Biomedical engineering [MQW]