Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology

Written by a world-renowned expert, this first book solely dedicated to electrochemical micromachining (EMM) focuses on applications in the semiconductor industry and on future directions of increasingly important EMM technology

Bijoy Bhattacharyya (Author)

9780323327374, Elsevier Science

Hardback, published 17 April 2015

296 pages
23.4 x 19 x 2.3 cm, 0.84 kg

"This book is an excellent addition to the nanotechnology literature…The book will be very useful to professionals as well as nonprofessionals who are interested in electrochemical micromachining. I strongly recommend this book for scientists, engineers, and those who wish to teach this subject." --MRS Bulletin

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM.

1. Introduction2. Electrochemical Machining: Macro to Micro3. Principle of Material Removal in EMM4. Types of EMM5. Electrochemical Micromachining (EMM) Setup6. Design and Development of Micro Tools7. Influencing Factors of EMM8. Improvement of Machining Accuracy9. Advantages, Applications and Limitations of EMM 10. Micro-Features Fabrication for MEMS and Other Microengineering Applications11. Electrochemical Micro System Technology (EMST)12. Recent Advancements in EMM for Nanofabrication13. Nano-Features on Metals and Semiconductors for Nanotechnology Applications

Subject Areas: Other manufacturing technologies [TDP], Electrochemistry & magnetochemistry [PNRH]