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Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning
Volume 9
The latest in a reference series on surface contamination and cleaning for industries ranging from semi-conductor fabrication to space exploration
Rajiv Kohli (Author), Kashmiri L. Mittal (Author)
9780323431576, Elsevier Science
Hardback, published 17 November 2016
212 pages
22.9 x 15.1 x 2 cm, 0.45 kg
Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods. This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales.
Chapter 1. Nonaqueous Cleaning Challenges for Preventing Damage to Fragile Nanostructures Chapter 2. Gas-Phase Cleaning for Removal of Surface Contaminants Chapter 3. Laser-Induced Spray Jet Cleaning Chapter 4. Brush Scrubbing for Post-CMP Cleaning Chapter 5. Contamination Removal From UV and EUV Photomasks Chapter 6. Aqueous Displacement of Water-Immiscible Cleaning Solvents: Cleaning Enhancement Using Ultrasonics
Subject Areas: Industrial chemistry [TDC]
