Analysis and Design Principles of MEMS Devices

An exciting look into how sensors and actuators work

Minhang Bao (Author)

9780444516169, Elsevier Science

Hardback, published 12 April 2005

328 pages
24 x 16.5 x 2.4 cm, 0.76 kg

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.

Chapter 1. Introduction to MEMS devices

Chapter 2. Basic mechanics of beam and diaphragm structures

Chapter 3. Air Damping

Chapter 4. Electrostatic Actuation

Chapter 5. Capacitive Sensing and Effects of Electrical Excitation

Chapter 6. Piezoresistive Sensing

Subject Areas: Electrical engineering [THR], Engineering skills & trades [TGX], Mechanical engineering [TGB], Other manufacturing technologies [TDP]