Amorphous and Plycrystalline Thin-Film Silicon Science and Technology — 2008: Volume 1066

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Arokia Nathan (Edited by), Andrew Flewitt (Edited by), Jack Hou (Edited by), Seiichi Miyazaki (Edited by), Jeffrey Yang (Edited by)

9781605110363, Cambridge University Press

Hardback, published 22 October 2008

496 pages
23.5 x 16 x 3.5 cm, 0.9 kg

Amorphous, nano-, micro- and polycrystalline silicon thin films and associated alloys are used in a plethora of applications ranging from active matrix displays and imaging arrays to solar panels. These applications make large-area electronics the fastest growing semiconductor technology today, pushing material requirements and device performance to new limits. This book brings together researchers to share their expertise. Materials addressed include amorphous, nano-, micro- and polycrystalline silicon, and their alloys with germanium, carbon and other elements. Topics include: the understanding of growth processes; producing high-quality films at high growth rates or low temperatures; in situ characterization techniques for monitoring growth; understanding amorphous, mixed-phase and crystalline structures, along with the principles for augmenting crystallinity; developing post-deposition processes; identifying fundamental issues in electronic structure and carrier transport in 3D, 2D and 1D; understanding metastability and the role of hydrogen; integrating photovoltaic devices and thin-film electronics into systems on glass, flexible polymeric and other nonconventional substrates; and designing, fabricating and testing devices and applications.

Preface
Part I. Film Growth
Part II. Defects and Transport
Part III. Solar Cells I
Part IV. Characterization
Part V. Poster Session: Thin-Film Growth
Part VI. Poster Session: Amorphous, Micro-, Nano- and Polycrystalline Silicon
Part VII. Poster Session: Alloys, Structural Properties and Solar Cells
Part VIII. Novel Applications
Part IX. Thin-Film Transistors I
Part X. Alloys: Microcrystalline Silicon
Part XI. Film Growth and Characterization I
Part XII. Crystallization Techniques
Part XIII. Thin-Film Transistors II
Part XIV. Solar Cells II
Part XV. Film Growth and Characterization II
Part XVI. Poster Session: Thin-Film Transistors
Part XVII. Poster Session: Crystallization Techniques
Part XVIII. Poster Session: Imagers, Sensors and Novel Applications
Part XIX. Sensors, Transistors and Active Matrix Arrays I
Part XX. Sensors, Transistors and Active Matrix Arrays II
Author index
Subject index.

Subject Areas: Materials science [TGM]