Advanced Metallization Conference 2008 (AMC 2008): Volume 24

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Mehul Naik (Edited by), Roey Shaviv (Edited by), Takashi Yoda (Edited by), Kazuyoshi Ueno (Edited by)

9781605111254, Materials Research Society

Hardback, published 1 January 2009

769 pages
23.5 x 15.8 x 4.3 cm, 1.15 kg

The Advanced Metallization Conference - held in San Diego, California, and Tokyo, Japan - marked its 25th anniversary in 2008. These two sister conferences form a unique 'one conference at two sites' that focuses on the latest R&D and manufacturing results, as well as real-world integration and reliability data on the application of metallization and related technologies for advanced IC devices. Scientists and engineers from around the world came to listen and present state-of-the-art work in the field of ULSI interconnect technology including metallization, dielectrics, integration, packaging, design and vertical integration. A keynote address by Gary Patton, vice president, IBM Systems and Technology Group, on 'Leading-edge Silicon Technology through Innovation and Collaboration', is featured. Additional topics include: integration; metallization; materials and characterization; CMP and cleaning; 3D integration and packaging; low-k materials; and reliability and yield.

Subject Areas: Materials science [TGM]