A Review: Ultrahigh-Vacuum Technology for Electron Microscopes

Explores how to avoid or solve problems when operating or designing vacuum systems

Nagamitsu Yoshimura (Author)

9780128185735

Paperback, published 19 February 2020

568 pages, Approx. 160 illustrations
27.6 x 21.5 x 3.5 cm, 0.45 kg

A Review: Ultrahigh-Vacuum Technology for Electron Microscopes provides information on the fundamentals of ultra-high vacuum systems. It covers the very subtle process that can help increase pressure inside the microscope (or inside any other ultra-high vacuum system) and the different behavior of the molecules contributing to this kind of process. Prof Yoshimura’s book offers detailed information on electron microscope components, as well as UHV technology. This book is an ideal resource for industrial microscopists, engineers and scientists responsible for the design, operation and maintenance of electron microscopes. In addition, engineering students or engineers working with electron microscopes will find it useful.

1. Phenomena Induced by Fine Electron-Probe Irradiation2. Electron Induced Gas Desorption3. Microdischarges in High Vacuum4. Sputter-Ion Pump (SIP) for Extreme-High-Vacuum Use5. Development of Diffusion Pump (DP) System for Electron Microscopes

Subject Areas: Engineering: general [TBC]