A Guide to Hands-on MEMS Design and Prototyping

Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide for students and professionals.

Joel A. Kubby (Author)

9780521889254, Cambridge University Press

Hardback, published 25 August 2011

178 pages, 132 b/w illus. 1 table 33 exercises
23.5 x 15.8 x 1.4 cm, 0.43 kg

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

1. Introduction
2. Micro-mechanics
3. Electrostatics
4. Optical MEMS
5. Thermal MEMS
6. Fluidic MEMS
7. Package and test
8. From prototype to product: MEMS deformable mirrors for adaptive optics.

Subject Areas: WAP [wireless technology TJKW], Microwave technology [TJFN], Mechanical engineering [TGB]