{"product_id":"spectroscopic-ellipsometry-principles-and-applications-hardback-9780470016084","title":"Spectroscopic Ellipsometry; Principles and Applications (Hardback) 9780470016084","description":"\u003cfont face=\"Georgia\"\u003e\r\n\u003cp\u003e\u003cfont size=\"6\"\u003eSpectroscopic Ellipsometry\u003c\/font\u003e\u003cbr\u003e\r\n\u003cfont size=\"5\"\u003ePrinciples and Applications\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\u003cp\u003e\u003cfont size=\"4\"\u003eHiroyuki Fujiwara (Author)\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e9780470016084, Wiley\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eHardback, published 26 January 2007\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e392 pages\u003cbr\u003e23.5 x 16 x 2.7 cm, 0.765 kg\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\r\n\u003cp align=\"justify\"\u003e\u003cstrong\u003e\u003cfont size=\"3\"\u003eEllipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.\u003c\/font\u003e\u003c\/strong\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e\u003cb\u003eForeword.\u003c\/b\u003e  \u003cp\u003e\u003cb\u003ePreface.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAcknowledgments.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003e1 Introduction to Spectroscopic Ellipsometry.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e1.1 Features of Spectroscopic Ellipsometry.\u003c\/p\u003e \u003cp\u003e1.2 Applications of Spectroscopic Ellipsometry.\u003c\/p\u003e \u003cp\u003e1.3 Data Analysis.\u003c\/p\u003e \u003cp\u003e1.4 History of Development.\u003c\/p\u003e \u003cp\u003e1.5 Future Prospects.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e2 Principles of Optics.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e2.1 Propagation of Light.\u003c\/p\u003e \u003cp\u003e2.2 Dielectrics.\u003c\/p\u003e \u003cp\u003e2.3 Reflection and Transmission of Light.\u003c\/p\u003e \u003cp\u003e2.4 Optical Interference.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e3 Polarization of Light.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e3.1 Representation of Polarized Light.\u003c\/p\u003e \u003cp\u003e3.2 Optical Elements.\u003c\/p\u003e \u003cp\u003e3.3 Jones Matrix.\u003c\/p\u003e \u003cp\u003e3.4 Stokes Parameters.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e4 Principles of Spectroscopic Ellipsometry.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e4.1 Principles of Ellipsometry Measurement.\u003c\/p\u003e \u003cp\u003e4.2 Ellipsometry Measurement.\u003c\/p\u003e \u003cp\u003e4.3 Instrumentation for Ellipsometry.\u003c\/p\u003e \u003cp\u003e4.4 Precision and Error of Measurement.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e5 Data Analysis.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e5.1 Interpretation of (Ψ, Δ).\u003c\/p\u003e \u003cp\u003e5.2 Dielectric Function Models.\u003c\/p\u003e \u003cp\u003e5.3 Effective Medium Approximation.\u003c\/p\u003e \u003cp\u003e5.4 Optical Models.\u003c\/p\u003e \u003cp\u003e5.5 Data Analysis Procedure.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e6 Ellipsometry of Anisotropic Materials.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e6.1 Reflection and Transmission of Light by Anisotropic Materials.\u003c\/p\u003e \u003cp\u003e6.2 Fresnel Equations for Anisotropic Materials.\u003c\/p\u003e \u003cp\u003e6.3 4×4 Matrix Method.\u003c\/p\u003e \u003cp\u003e6.4 Interpretation of (Ψ, Δ) for Anisotropic Materials.\u003c\/p\u003e \u003cp\u003e6.5 Measurement and Data Analysis of Anisotropic Materials.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e7 Data Analysis Examples.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e7.1 Insulators.\u003c\/p\u003e \u003cp\u003e7.2 Semiconductors.\u003c\/p\u003e \u003cp\u003e7.3 Metals\/Semiconductors.\u003c\/p\u003e \u003cp\u003e7.4 Organic Materials\/Biomaterials.\u003c\/p\u003e \u003cp\u003e7.5 Anisotropic Materials.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e8 Real-Time Monitoring by Spectroscopic Ellipsometry.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e8.1 Data Analysis in Real-Time Monitoring.\u003c\/p\u003e \u003cp\u003e8.2 Observation of Thin-Film Growth by Real-Time Monitoring.\u003c\/p\u003e \u003cp\u003e8.3 Process Control by Real-Time Monitoring.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendices.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003e1 Trigonometric Functions.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003e2 Definitions of Optical Constants.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003e3 Maxwell’s Equations for Conductors.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003e4 Jones–Mueller Matrix Conversion.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003e5 Kramers–Kronig Relations.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003eIndex.\u003c\/b\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eSubject Areas: Chemistry [\u003ca title=\"See our other books on Chemistry\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Chemistry%20%5BPN%5D%22\"\u003ePN\u003c\/a\u003e]\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003c\/font\u003e","brand":"Wiley","offers":[{"title":"Brand New","offer_id":52516368318744,"sku":"9780470016084","price":141.99,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0730\/2037\/5320\/files\/9780470016084.jpg?v=1786684115","url":"https:\/\/freshlyprintedbooks.co.uk\/products\/spectroscopic-ellipsometry-principles-and-applications-hardback-9780470016084","provider":"Freshly Printed Books","version":"1.0","type":"link"}