{"product_id":"silicon-micromachining-paperback-9780521607674","title":"Silicon Micromachining (Paperback) 9780521607674","description":"\u003cfont face=\"Georgia\"\u003e\r\n\u003cp\u003e\u003cfont size=\"6\"\u003eSilicon Micromachining\u003c\/font\u003e\u003cbr\u003e\r\n\r\n\r\n\u003c\/p\u003e\n\u003cp\u003e\u003cem\u003eA comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.\u003c\/em\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003cp\u003e\u003cfont size=\"4\"\u003eM. Elwenspoek (Author), H. V. Jansen (Author)\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e9780521607674, Cambridge University Press\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003ePaperback, published 19 August 2004\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e420 pages, 388 b\/w illus.  20 tables\u003cbr\u003e24.7 x 18.9 x 2.2 cm, 0.773 kg\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\u003cp align=\"justify\"\u003e\u003cem\u003e\u003cfont size=\"3\"\u003e'This book has many admirable properties. It covers the chosen subject in considerable detail and brings together much of the state-of-the-art. The illustrations and photographs are of very high quality and indeed the whole book is well presented. It will be useful to both the experienced engineer wishing to sort out a few problems in his own work and to those requiring an introduction to silicon microengineering' R. A. Lawes, Engineering Science and Education Journal\u003c\/font\u003e\u003c\/em\u003e\u003c\/p\u003e\r\n\r\n\u003cp align=\"justify\"\u003e\u003cstrong\u003e\u003cfont size=\"3\"\u003eThis comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion of each technique with a brief review of the fundamental physical and chemical principles involved. They pay particular attention to methods such as isotropic and anisotropic wet chemical etching, wafer bonding, reactive ion etching, and surface micromachining. There is a special section on bulk micromachining, and the authors also discuss release mechanisms for movable microstructures. The book is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).\u003c\/font\u003e\u003c\/strong\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e1. Introduction\u003cbr\u003e 2. Anisotropic wet chemical etching\u003cbr\u003e 3. Chemical physics of wet chemical etching\u003cbr\u003e 4. Waferbonding\u003cbr\u003e 5. Examples and applications\u003cbr\u003e 6. Surface micromachining\u003cbr\u003e 7. Isotropic wet chemical etching of silicon\u003cbr\u003e 8. Introduction into dry etching\u003cbr\u003e 9. Why plasmas?\u003cbr\u003e 10. Plasma system configurations\u003cbr\u003e 11. What is plasma etching?\u003cbr\u003e 12. Contact plasma etching\u003cbr\u003e 13. Remote plasma etching\u003cbr\u003e 14. High aspect ratio trench etching\u003cbr\u003e 15. Moulding of microstructures\u003cbr\u003e 16. Fabrication of movable microstructures.\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eSubject Areas: Electronic devices \u0026amp; materials [\u003ca title=\"See our other books on Electronic devices \u0026amp; materials\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Electronic%20devices%20\u0026amp;%20materials%20%5BTJFD%5D%22\"\u003eTJFD\u003c\/a\u003e]\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003c\/font\u003e","brand":"Cambridge University Press","offers":[{"title":"Default Title","offer_id":46129238507800,"sku":"9780521607674","price":61.99,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0730\/2037\/5320\/products\/9780521607674i.jpg?v=1691666418","url":"https:\/\/freshlyprintedbooks.co.uk\/products\/silicon-micromachining-paperback-9780521607674","provider":"Freshly Printed Books","version":"1.0","type":"link"}