{"product_id":"rapid-thermal-processing-hardback-9780080436128","title":"Rapid Thermal Processing (Hardback) 9780080436128","description":"\u003cfont face=\"Georgia\"\u003e\r\n\u003cp\u003e\u003cfont size=\"6\"\u003eRapid Thermal Processing\u003c\/font\u003e\u003cbr\u003e\r\n\r\n\r\n\r\n\r\n\r\n\u003c\/p\u003e\n\u003cp\u003e\u003cfont size=\"4\"\u003eA. Slaoui (Edited by), T. Theiler (Edited by), J.C. Muller (Edited by), R.K. Singh (Edited by)\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e9780080436128\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eHardback, published 17 March 1999\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e0 pages\u003cbr\u003e27.8 x 21 x 1.3 cm, 0.58 kg\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\r\n\u003cp align=\"justify\"\u003e\u003cstrong\u003e\u003cfont size=\"3\"\u003e\u003cp\u003e\u003ci\u003eRapid Thermal Processing\u003c\/i\u003e (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. The biggest advantage of RTP is that it eliminates the long-ramp-up and ramp-down times associated with furnaces, enabling a significant reduction in the thermal budget. Today, RTP is in production use for source\/drain implant annealing, contact alloying, formation of refractory nitrides and silicides and thin gate dielectric (oxide) formation. The aim of Symposium I was to provide an overview of the latest information on research and development in the different topics cited above. The potential applications of RTP in new areas like large area devices such as flat planel displays and solar cells has to be investigated.\u003c\/p\u003e  \u003cp\u003eAbout 30 papers were presented in this symposium. The contributions of most interest involved modelling and control, junctions formation and thermal oxidation, deposition and recrystallisation and silicide formations. However, the range of topics and the intent to focus on underlying, fundamental issues like dopant diffusion in silicon from solid sources, strain relaxation and photonic effects, nucleation as well as applications to magnetic films and solar cells devices.\u003c\/p\u003e\u003c\/font\u003e\u003c\/strong\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e\u003cb\u003eSelected papers:\u003c\/b\u003e Preface. Rapid thermal processing technology for the 21st century (P.J. Timans). Modelling and off-line optimization of a 300 mm rapid thermal processing system (A. Tillmann \u003ci\u003eet al.\u003c\/i\u003e). Perspectives on emissivity measurements and modeling in silicon (S. Abedrabbo \u003ci\u003eet al.\u003c\/i\u003e). Dopant diffusion studies and free carrier lifetimes during rapid thermal processing of semiconductors (R.V. Nagabushnam \u003ci\u003eet al.\u003c\/i\u003e). Phosphorus diffusion from a spin-on doped glass (SOD) source during rapid thermal annealing (D. Mathiot \u003ci\u003eet al.\u003c\/i\u003e). Formation of contacts to shallow junctions using titanium silicide with diffusion barriers (W. Zagozdzon-Wosik \u003ci\u003eet al.\u003c\/i\u003e). Effect of stress on silicide formation kinetics in thin film titanium–selicon system (R.V. Nagabushnam \u003ci\u003eet al.\u003c\/i\u003e). Strain relaxation and dopant distribution in the rapid thermal annealing of Co with Si\/Si1–\u0026amp;khgr;Ge\u0026amp;khgr;\/Si heterostructure (Y. Miron \u003ci\u003eet al.\u003c\/i\u003e). Rapid thermal annealing of Zr\/SiGeC contacts (M. Barthula \u003ci\u003eet al.\u003c\/i\u003e). Influence of vapour phase pre-oxide-cleaning on the oxidation characteristics (B. Froeschle \u003ci\u003eet al.\u003c\/i\u003e). Rapid thermal oxidation of porous silicon for surface passivation (L. Debarge \u003ci\u003eet al.\u003c\/i\u003e). Deposition and crystallization of a-Si thin films by rapid thermal processing (S. Girginoudi \u003ci\u003eet al.\u003c\/i\u003e). The initial stages of Si thin deposits on foreign substrates in a rapid thermal chemical vapor phase reactor (D. Angermeier \u003ci\u003eet al.\u003c\/i\u003e). Rapid thermal magnetic annealing as an emerging technology in field-annealing of thin magnetic films for recording heads (F. Roozeboom \u003ci\u003eet al.\u003c\/i\u003e). Selective doping of silicon by rapid thermal and laser assisted processes (U. Besi-Vetrella \u003ci\u003eet al.\u003c\/i\u003e). Rapid thermal annealing applied to the optimization of titanium oxide arc (M. Lemiti \u003ci\u003eet al.\u003c\/i\u003e).\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eSubject Areas: Semi-conductors \u0026amp; super-conductors [\u003ca title=\"See our other books on Semi-conductors \u0026amp; super-conductors\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Semi-conductors%20\u0026amp;%20super-conductors%20%5BTJFD5%5D%22\"\u003eTJFD5\u003c\/a\u003e], Materials science [\u003ca title=\"See our other books on Materials science\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Materials%20science%20%5BTGM%5D%22\"\u003eTGM\u003c\/a\u003e], Other manufacturing technologies [\u003ca title=\"See our other books on Other manufacturing technologies\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Other%20manufacturing%20technologies%20%5BTDP%5D%22\"\u003eTDP\u003c\/a\u003e], Quantum physics [\u003ca title=\"See our other books on Quantum physics\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Quantum%20physics%20%5Bquantum%20mechanics%20\u0026amp;%20quantum%20field%20theory%5D%20%5BPHQ%5D%22\"\u003equantum mechanics \u0026amp; quantum field theory PHQ\u003c\/a\u003e]\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003c\/font\u003e","brand":"Freshly Printed Books","offers":[{"title":"Default Title","offer_id":46649089655064,"sku":"9780080436128","price":96.39,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0730\/2037\/5320\/products\/9780080436128.jpg?v=1694097166","url":"https:\/\/freshlyprintedbooks.co.uk\/products\/rapid-thermal-processing-hardback-9780080436128","provider":"Freshly Printed Books","version":"1.0","type":"link"}