{"product_id":"microelectromechanical-systems-materials-and-devices-iv-volume-1299-paperback-9781107406834","title":"Microelectromechanical Systems - Materials and Devices IV: Volume 1299 (Paperback \/ softback) 9781107406834","description":"\u003cfont face=\"Georgia\"\u003e\r\n\u003cp\u003e\u003cfont size=\"6\"\u003eMicroelectromechanical Systems - Materials and Devices IV: Volume 1299\u003c\/font\u003e\u003cbr\u003e\r\n\r\n\r\n\u003c\/p\u003e\n\u003cp\u003e\u003cem\u003eSymposium S, 'Microelectromechanical Systems - Materials and Devices IV', focused on micro- and nanoelectromechanical systems (MEMS\/NEMS).\u003c\/em\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003cp\u003e\u003cfont size=\"4\"\u003eFrank W. DelRio (Edited by), Maarten P. de Boer (Edited by), Christoph Eberl (Edited by), Evgeni Gusev (Edited by)\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e9781107406834, Cambridge University Press\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003ePaperback \/ softback, published 5 June 2014\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e220 pages, 143 b\/w illus.  12 tables\u003cbr\u003e22.9 x 15.2 x 1.2 cm, 0.3 kg\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\r\n\u003cp align=\"justify\"\u003e\u003cstrong\u003e\u003cfont size=\"3\"\u003eSymposium S, 'Microelectromechanical Systems - Materials and Devices IV', held November 29–December 3 at the 2010 MRS Fall Meeting in Boston, Massachusetts, focused on micro- and nanoelectromechanical systems (MEMS\/NEMS), technologies which were spawned from the fabrication and integration of small-scale mechanical, electrical, thermal, magnetic, fluidic and optical sensors and actuators with micro-electronic components. MEMS and NEMS have enabled performance enhancements and manufacturing cost reductions in a number of applications, including optical displays, acceleration sensing, radio-frequency switching, drug delivery, chemical detection and power generation and storage. Although originally based on silicon microelectronics, the reach of MEMS and NEMS has extended well beyond traditional engineering materials and now includes nanomaterials (nanotubes, nanowires, nanoparticles), smart materials (piezoelectric and ferroelectric materials, shape memory alloys, pH-sensitive polymers), metamaterials and biomaterials (ceramic, metallic, polymeric, composite-based implant materials). While these new materials provide more freedom with regards to the design space of MEMS and NEMS, they also introduce a number of new fabrication and characterization challenges not previously encountered with silicon-based technology.\u003c\/font\u003e\u003c\/strong\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003ePart I. Material Development and Optimization: 1. Biodegradable microfluidic scaffolds with tunable degradation properties from amino alcohol-based poly(ester amide) elastomers Jane Wang\u003cbr\u003e 2. Measurements of resonance frequency of parylene microspring arrays using atomic force microscopy Churamani Gaire\u003cbr\u003e 3. Gold in flux-less bonding: noble or not noble Marco Balucani\u003cbr\u003e 4. Giant piezoresistive variation of metal particles dispersed in PDMS matrix Stefano Stassi\u003cbr\u003e 5. Characterization of Group III-nitride based surface acoustic wave devices for high temperature applications J. Justice\u003cbr\u003e 6. Transport model for microfluidic device for cell culture and tissue development Niraj Inamdar\u003cbr\u003e 7. Refractive index memory effect of ferroelectric materials by domain control Kazuhiko Inoue\u003cbr\u003e 8. Synthesis and control of ZnS nanodots and nanorods with different crystalline structure from an identical raw material solution and the excitonic UV emission Masato Uehara\u003cbr\u003e 9. Improving PZT thin film texture through Pt metallization and seed layers Luz Sanchez\u003cbr\u003e Part II. Process Integration: 10. Patterning nanomaterials on fragile micromachined structures using electron beam lithography Srikar Vengallatore\u003cbr\u003e 11. Pt\/TiO2 growth templates for enhanced PZT films and MEMS devices Daniel Potrepka\u003cbr\u003e 12. Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210°C Joumana El-Rifai\u003cbr\u003e 13. PZT thick films for 100 MHz ultrasonic transducers fabricated using chemical solution deposition process Naoto Kochi\u003cbr\u003e 14. Reliability and stability of thin-film amorphous silicon MEMS on glass substrates Pedro Sousa\u003cbr\u003e 15. High yield polymer MEMS process for CMOS\/MEMS integration V. Seena\u003cbr\u003e 16. Characterization of textured PZT thin films prepared by sol-gel method onto stainless steel substrates Xuelian Zhao\u003cbr\u003e Part III. Micro- and Nanosensors: 17. A picowatt energy harvester Joseph Evans\u003cbr\u003e 18. Mechanical and material characterization of bilayer microcantilever-based IR detectors Xin Zhang\u003cbr\u003e 19. Film conductivity controlled variation of the amplitude distribution of high-temperature resonators Silja Schmidtchen\u003cbr\u003e 20. Ultrafine silicon nano-wall hollow needles and applications in inclination sensor and gas transport Zeinab Sanaee\u003cbr\u003e 21. Development of a robust design for wet etched co-integrated pressure sensor systems Reinhart Job\u003cbr\u003e 22. SU8\/modified MWNT composite for piezoresistive sensor application V. Seena\u003cbr\u003e 23. Thin film amorphous silicon bulk-mode disk resonators fabricated on glass substrates Alexandra Gualdino\u003cbr\u003e 24. Fabrication and characterization of MEMS-based structures from a bio-inspired, chemo-responsive polymer nanocomposite Allison Hess\u003cbr\u003e Part IV. Material and Device Reliability: 25. Characterizing the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures Enrique Escobedo-Cousin\u003cbr\u003e 26. Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing Reiko Hiruta\u003cbr\u003e 27. Characterisation of hydrophobic forces in liquid self assembly of micron sized functional building blocks Maurizio Gullo\u003cbr\u003e 28. Nanoindentation characterization of PECVD silicon nitride on silicon subjected to mechanical fatigue loading Kuo-Shen Chen\u003cbr\u003e 29. Effect of phosphorus doping on the Young's modulus and stress of polysilicon thin films Elena Bassiachvili\u003cbr\u003e 30. Residual stress in sputtered silicon oxycarbide thin films Xin Zhang\u003cbr\u003e 31. Solid bridging during pattern collapse (stiction) studied on silicon nanoparticles Daniel Peter\u003cbr\u003e 32. Fabrication and characterization of two compliant electrical contacts for MEMS: gallium microdroplets and carbon nanotube turfs Yoonkap Kim.\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eSubject Areas: Materials science [\u003ca title=\"See our other books on Materials science\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Materials%20science%20%5BTGM%5D%22\"\u003eTGM\u003c\/a\u003e]\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003c\/font\u003e","brand":"Cambridge University Press","offers":[{"title":"Default Title","offer_id":46265693864216,"sku":"9781107406834","price":25.79,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0730\/2037\/5320\/products\/9781107406834i.jpg?v=1694485053","url":"https:\/\/freshlyprintedbooks.co.uk\/products\/microelectromechanical-systems-materials-and-devices-iv-volume-1299-paperback-9781107406834","provider":"Freshly Printed Books","version":"1.0","type":"link"}