{"product_id":"introduction-to-microsystem-technology-a-guide-for-students-hardback-9780470058619","title":"Introduction to Microsystem Technology; A Guide for Students (Hardback) 9780470058619","description":"\u003cfont face=\"Georgia\"\u003e\r\n\u003cp\u003e\u003cfont size=\"6\"\u003eIntroduction to Microsystem Technology\u003c\/font\u003e\u003cbr\u003e\r\n\u003cfont size=\"5\"\u003eA Guide for Students\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\u003cp\u003e\u003cfont size=\"4\"\u003eGerald Gerlach (Author), Wolfram Dotzel (Author), Dörte Müller (Translated by)\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e9780470058619, Wiley\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eHardback, published 14 March 2008\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e376 pages\u003cbr\u003e25.2 x 17.5 x 2.6 cm, 0.78 kg\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\r\n\u003cp align=\"justify\"\u003e\u003cstrong\u003e\u003cfont size=\"3\"\u003eOver half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads.  \u003cp\u003eThis textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, \u003ci\u003eIntroduction to Microsystem Technology\u003c\/i\u003e covers the following:\u003c\/p\u003e \u003cul type=\"disc\"\u003e \u003cli\u003emicrosystem materials (including silicon, polymers and thin films), and the scaling effects of going micro;\u003c\/li\u003e \u003cli\u003efabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques;\u003c\/li\u003e \u003cli\u003esensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described);\u003c\/li\u003e \u003cli\u003ethe influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe?\u003c\/li\u003e \u003c\/ul\u003e \u003cp\u003eThe book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.\u003c\/p\u003e\u003c\/font\u003e\u003c\/strong\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e\u003cb\u003ePreface.\u003c\/b\u003e  \u003cp\u003e\u003cb\u003eList of Symbols.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003eList of Abbreviations.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003e1 Introduction.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e1.1 What is a Microsystem?\u003c\/p\u003e \u003cp\u003e1.2 Microelectronics and Microsystem Technology.\u003c\/p\u003e \u003cp\u003e1.3 Areas of Application and Trends of Development.\u003c\/p\u003e \u003cp\u003e1.4 Example: Yaw Rate Sensor.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e2 Scaling and Similarity.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e2.1 Scaling.\u003c\/p\u003e \u003cp\u003e2.2 Similarity and Dimensionless Numbers.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e3 Materials.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e3.1 Overview.\u003c\/p\u003e \u003cp\u003e3.2 Single Crystalline Silicon.\u003c\/p\u003e \u003cp\u003e3.3 Glasses.\u003c\/p\u003e \u003cp\u003e3.4 Polymers.\u003c\/p\u003e \u003cp\u003e3.5 Thin Films.\u003c\/p\u003e \u003cp\u003e3.6 Comparison of Material Characteristics.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e4 Microfabrication.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e4.1 Overview.\u003c\/p\u003e \u003cp\u003e4.2 Cleanliness During Production.\u003c\/p\u003e \u003cp\u003e4.3 Lithography.\u003c\/p\u003e \u003cp\u003e4.4 Thin-film Formation.\u003c\/p\u003e \u003cp\u003e4.5 Layer Patterning.\u003c\/p\u003e \u003cp\u003e4.6 Anisotropic Wet Chemical Deep Etching.\u003c\/p\u003e \u003cp\u003e4.7 Doping.\u003c\/p\u003e \u003cp\u003e4.8 Bonding Techniques.\u003c\/p\u003e \u003cp\u003e4.9 Insulation Techniques.\u003c\/p\u003e \u003cp\u003e4.10 Surface Micromachining.\u003c\/p\u003e \u003cp\u003e4.11 Near-surface Micromachining.\u003c\/p\u003e \u003cp\u003e4.12 HARMST.\u003c\/p\u003e \u003cp\u003e4.13 Miniaturized Classical Techniques.\u003c\/p\u003e \u003cp\u003e4.14 Selection of Microtechnical Manufacturing Techniques.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e5 Packaging.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e5.1 Tasks and Requirements.\u003c\/p\u003e \u003cp\u003e5.2 Functions of Packaging.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e6 Function and Form Elements in Microsystem Technology.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e6.1 Mechanical Elements.\u003c\/p\u003e \u003cp\u003e6.2 Fluidic Elements.\u003cbr\u003e \u003c\/p\u003e \u003cp\u003e6.3 Thermal Elements.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e7 Sensors and Actuators.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e7.1 Reversible and Parametric Transducers.\u003c\/p\u003e \u003cp\u003e7.2 Transducers for Sensors and Actuators.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e8 Design of Microsystems.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e8.1 Design Methods and Tools.\u003c\/p\u003e \u003cp\u003e8.2 Systems with Lumped Parameters.\u003c\/p\u003e \u003cp\u003e8.3 Systems with Distributed Parameters.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e9 Effect of Technological Processes on Microsystem Properties.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e9.1 Parameter-based Microsystem Design.\u003c\/p\u003e \u003cp\u003e9.2 Robust Microsystem Design.\u003c\/p\u003e \u003cp\u003e\u003cb\u003e10 The Future of Microsystems.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e10.1 Status and Trends in Microsystem Technology.\u003c\/p\u003e \u003cp\u003e10.2 Microoptical Applications.\u003c\/p\u003e \u003cp\u003e10.3 Probe Tips.\u003c\/p\u003e \u003cp\u003e10.4 RF Microsystems.\u003c\/p\u003e \u003cp\u003e10.5 Actuators.\u003c\/p\u003e \u003cp\u003e10.6 Microfluidic Systems.\u003c\/p\u003e \u003cp\u003e10.7 Chemical, Biological and Medical Systems.\u003c\/p\u003e \u003cp\u003e10.8 Energy Harvesting and Wireless Communications.\u003c\/p\u003e \u003cp\u003e10.9 Micro Fuel Cells.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix A Physical Constants.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix B Coordinate Transformation.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003eB.1 Elastic Coefficients.\u003c\/p\u003e \u003cp\u003eB.2 Piezoresistive Coefficients.\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix C Properties of Silicon Dioxide and Silicon Nitride Layers.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003eReferences.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix D Nomenclature of Thin-film Processes.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003eReference.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eAppendix E Adhesion of Surface Micromechanical Structures.\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003eE.1 Capillary Forces.\u003c\/p\u003e \u003cp\u003eE.2 Critical Length of Cantilever Springs.\u003c\/p\u003e \u003cp\u003eReference.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eIndex.\u003c\/b\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eSubject Areas: Electronics \u0026amp; communications engineering [\u003ca title=\"See our other books on Electronics \u0026amp; communications engineering\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Electronics%20\u0026amp;%20communications%20engineering%20%5BTJ%5D%22\"\u003eTJ\u003c\/a\u003e]\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003c\/font\u003e","brand":"Wiley","offers":[{"title":"Brand New","offer_id":52256844644632,"sku":"9780470058619","price":80.88,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0730\/2037\/5320\/files\/9780470058619.jpg?v=1781275214","url":"https:\/\/freshlyprintedbooks.co.uk\/products\/introduction-to-microsystem-technology-a-guide-for-students-hardback-9780470058619","provider":"Freshly Printed Books","version":"1.0","type":"link"}