{"product_id":"handbook-of-silicon-wafer-cleaning-technology-hardback-9780815515548","title":"Handbook of Silicon Wafer Cleaning Technology (Hardback) 9780815515548","description":"\u003cfont face=\"Georgia\"\u003e\r\n\u003cp\u003e\u003cfont size=\"6\"\u003eHandbook of Silicon Wafer Cleaning Technology\u003c\/font\u003e\u003cbr\u003e\r\n\r\n\r\n\u003c\/p\u003e\n\u003cp\u003e\u003cem\u003eProvides knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits\u003c\/em\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003cp\u003e\u003cfont size=\"4\"\u003eKaren Reinhardt (Edited by), Werner Kern (Edited by)\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e9780815515548\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eHardback, published 10 March 2008\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e748 pages\u003cbr\u003e22.9 x 15.2 x 4.5 cm, 1.08 kg\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\r\n\u003cp align=\"justify\"\u003e\u003cstrong\u003e\u003cfont size=\"3\"\u003eThe second Edition of the \u003ci\u003eHandbook of Silicon Wafer Cleaning Technolog\u003c\/i\u003ey is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, residue, and photoresist from wafer surfaces. Both the process and the equipment are covered. A review of the current cleaning technologies is included. Also, advanced cleaning technologies that are under investigation for next generation processing are covered; including supercritical fluid, laser, and cryoaerosol cleaning techniques. Additionally theoretical aspects of the cleaning technologies and how these processes affect the wafer is discussed such as device damage and surface roughening will be discussed. The analysis of the wafers surface is outlined. A discussion of the new materials and the changes required for the surface conditioning process used for manufacturing is also included.\u003c\/font\u003e\u003c\/strong\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e\u003cp\u003e\u003cb\u003ePart 1: Introduction and Overview\u003c\/b\u003e Overview and Evolution of Silicon Wafer Cleaning Technology Overview of Wafer Contamination and Defectivity\u003c\/p\u003e \u003cp\u003e\u003cb\u003ePart 2: Wet-Chemical Processes \u003c\/b\u003eParticle Deposition and Adhesion Aqueous Cleaning and Surface Conditioning Processes\u003c\/p\u003e \u003cp\u003e\u003cb\u003ePart 3: Dry Cleaning Processes \u003c\/b\u003eGas-phase Wafer Cleaning Technology Plasma Stripping and Cleaning Cryogenic Aerosols and Supercritical Fluid Cleaning\u003c\/p\u003e \u003cp\u003e\u003cb\u003ePart 4: Analytical and Control Aspects \u003c\/b\u003eDetection and Measurement of Particulate Contaminants Surface Chemical Composition and Morphology Ultratrace Impurity and Surface Morphology Analysis Analysis and Control of Electrically Active Contaminants\u003c\/p\u003e \u003cp\u003e\u003cb\u003ePart 5: Directions for the Near Future\u003c\/b\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eSubject Areas: Semi-conductors \u0026amp; super-conductors [\u003ca title=\"See our other books on Semi-conductors \u0026amp; super-conductors\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Semi-conductors%20\u0026amp;%20super-conductors%20%5BTJFD5%5D%22\"\u003eTJFD5\u003c\/a\u003e], Electronic devices \u0026amp; materials [\u003ca title=\"See our other books on Electronic devices \u0026amp; materials\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Electronic%20devices%20\u0026amp;%20materials%20%5BTJFD%5D%22\"\u003eTJFD\u003c\/a\u003e], Other manufacturing technologies [\u003ca title=\"See our other books on Other manufacturing technologies\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Other%20manufacturing%20technologies%20%5BTDP%5D%22\"\u003eTDP\u003c\/a\u003e], Industrial chemistry \u0026amp; manufacturing technologies [\u003ca title=\"See our other books on Industrial chemistry \u0026amp; manufacturing technologies\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Industrial%20chemistry%20\u0026amp;%20manufacturing%20technologies%20%5BTD%5D%22\"\u003eTD\u003c\/a\u003e]\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003c\/font\u003e","brand":"Freshly Printed Books","offers":[{"title":"Default Title","offer_id":46648854151448,"sku":"9780815515548","price":151.69,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0730\/2037\/5320\/products\/9780815515548.jpg?v=1694094613","url":"https:\/\/freshlyprintedbooks.co.uk\/products\/handbook-of-silicon-wafer-cleaning-technology-hardback-9780815515548","provider":"Freshly Printed Books","version":"1.0","type":"link"}