{"product_id":"handbook-of-silicon-based-mems-materials-and-technologies-paperback-9780128177860","title":"Handbook of Silicon Based MEMS Materials and Technologies (Paperback) 9780128177860","description":"\u003cfont face=\"Georgia\"\u003e\r\n\u003cp\u003e\u003cfont size=\"6\"\u003eHandbook of Silicon Based MEMS Materials and Technologies\u003c\/font\u003e\u003cbr\u003e\r\n\r\n\r\n\u003c\/p\u003e\n\u003cp\u003e\u003cem\u003e\u003cp\u003eAn up-to-date overview of the current and emerging technologies in MEMS, also covering its application in a range of industry sectors\u003c\/p\u003e\u003c\/em\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003cp\u003e\u003cfont size=\"4\"\u003eMarkku Tilli (Edited by), Mervi Paulasto-Kröckel (Edited by), Matthias Petzold (Edited by), Horst Theuss (Edited by), Teruaki Motooka (Edited by), Veikko Lindroos (Edited by)\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e9780128177860\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003ePaperback, published 17 April 2020\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e1026 pages\u003cbr\u003e27.6 x 21.5 x 6.1 cm, 2.67 kg\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\r\n\u003cp align=\"justify\"\u003e\u003cstrong\u003e\u003cfont size=\"3\"\u003eApprox.996 pages\u003c\/font\u003e\u003c\/strong\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e\u003cp\u003e\u003cb\u003ePart I\u003c\/b\u003e 1. Properties of silicon; Fracture toughness 2. Czochralski Growth of Silicon Crystals 3. Properties of Silicon Crystals 4. Silicon Wafers: Preparation and Properties; Modern technologies  5. Epi Wafers: Preparation and Properties 6. Thin Films on Silicon  7. Thick-Film SOI Wafers: Preparation and properties\u003c\/p\u003e \u003cp\u003e\u003cb\u003ePart II\u003c\/b\u003e 8. Multiscale Modeling Methods 9. Mechanical Properties of Silicon Microstructures 10. Electrostatic and RF-Properties of MEMS Structures  11. Optical Modeling of MEMS 12. Modeling of Silicon Etching 13. Gas Damping in Vibrating MEMS Structures 14. Recent Progress in Large-scale Electronic State Calculations and Data-driven Sciences\u003c\/p\u003e \u003cp\u003e\u003cb\u003ePart III\u003c\/b\u003e 15. MEMS Lithography 16. Deep Reactive Ion Etching; update 17. Wet Etching of Silicon 18. Porous Silicon Based MEMS 19. Surface Micromachining 20. Vapor Phase Etch Processes for Silicon MEMS 21. Inkjet Printing, Laser-Based Micromachining and Micro 3D Printing Technologies for MEMS  22. Microfluidics and BioMEMS in Silicon\u003c\/p\u003e \u003cp\u003e\u003cb\u003ePart IV\u003c\/b\u003e 23. Silicon Direct Bonding 24. Anodic Bonding 25. Glass Frit Bonding 26. Metallic Alloy Seal Bonding 27. Emerging Wafer Bonding Technologies 28. Bonding of CMOS Processed Wafers 29. Wafer-Bonding Equipment 30. Encapsulation by Film Deposition 31. Dicing of MEMS Devices 32. 3D Integration of MEMS 33. Own chapter for eWLP 34. Through-Substrate Via Technologies for MEMS 35. Outgassing and Gettering\u003c\/p\u003e \u003cp\u003e\u003cb\u003ePart V\u003c\/b\u003e 36. Silicon Wafer and Thin Film Measurements 37. Oxygen and Bulk Microdefects in Silicon 38. Optical Measurement of Static and Dynamic Displacement in MEMS 39. MEMS Residual Stress Characterization: Methodology and Perspective  40. Microscale deformation analysis 41. Strength of Bonded Interfaces 42. Hermeticity Tests 43. MEMS testing and calibration 44. MEMS Reliability\u003c\/p\u003e \u003cp\u003e\u003cb\u003ePart VI\u003c\/b\u003e 45. Case Accelerometer 46. Case Gyroscope 47. Case Pressure Sensor 48. Case Microphone 49. Case Micromirror 50. Case Optical MEMs\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eSubject Areas: Materials science [\u003ca title=\"See our other books on Materials science\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Materials%20science%20%5BTGM%5D%22\"\u003eTGM\u003c\/a\u003e]\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003c\/font\u003e","brand":"Freshly Printed Books","offers":[{"title":"Default Title","offer_id":46649064882456,"sku":"9780128177860","price":196.49,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0730\/2037\/5320\/products\/9780128177860.jpg?v=1694096942","url":"https:\/\/freshlyprintedbooks.co.uk\/products\/handbook-of-silicon-based-mems-materials-and-technologies-paperback-9780128177860","provider":"Freshly Printed Books","version":"1.0","type":"link"}