{"product_id":"glow-discharge-processes-sputtering-and-plasma-etching-hardback-9780471078289","title":"Glow Discharge Processes; Sputtering and Plasma Etching (Hardback) 9780471078289","description":"\u003cfont face=\"Georgia\"\u003e\r\n\u003cp\u003e\u003cfont size=\"6\"\u003eGlow Discharge Processes\u003c\/font\u003e\u003cbr\u003e\r\n\u003cfont size=\"5\"\u003eSputtering and Plasma Etching\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\u003cp\u003e\u003cfont size=\"4\"\u003eBrian Chapman (Author)\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e9780471078289, Wiley\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eHardback, published 5 November 1980\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e432 pages\u003cbr\u003e24 x 16.4 x 3.3 cm, 0.848 kg\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\r\n\u003cp align=\"justify\"\u003e\u003cstrong\u003e\u003cfont size=\"3\"\u003eDevelops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.\u003c\/font\u003e\u003c\/strong\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eGases.\u003cbr\u003e \u003cbr\u003e Gas Phase Collision Processes.\u003cbr\u003e \u003cbr\u003e Plasmas.\u003cbr\u003e \u003cbr\u003e DC Glow Discharges.\u003cbr\u003e \u003cbr\u003e RF Discharges.\u003cbr\u003e \u003cbr\u003e Sputtering.\u003cbr\u003e \u003cbr\u003e Plasma Etching.\u003cbr\u003e \u003cbr\u003e Appendices.\u003cbr\u003e \u003cbr\u003e Index.\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eSubject Areas: Electronics \u0026amp; communications engineering [\u003ca title=\"See our other books on Electronics \u0026amp; communications engineering\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Electronics%20\u0026amp;%20communications%20engineering%20%5BTJ%5D%22\"\u003eTJ\u003c\/a\u003e]\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003c\/font\u003e","brand":"Wiley-Interscience","offers":[{"title":"Brand New","offer_id":52278197551384,"sku":"9780471078289","price":168.39,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0730\/2037\/5320\/files\/9780471078289.jpg?v=1781459676","url":"https:\/\/freshlyprintedbooks.co.uk\/products\/glow-discharge-processes-sputtering-and-plasma-etching-hardback-9780471078289","provider":"Freshly Printed Books","version":"1.0","type":"link"}