{"product_id":"delta-doping-of-semiconductors-paperback-9780521017961","title":"Delta-doping of Semiconductors (Paperback) 9780521017961","description":"\u003cfont face=\"Georgia\"\u003e\r\n\u003cp\u003e\u003cfont size=\"6\"\u003eDelta-doping of Semiconductors\u003c\/font\u003e\u003cbr\u003e\r\n\r\n\r\n\u003c\/p\u003e\n\u003cp\u003e\u003cem\u003eA comprehensive review of the theory and application of delta-doping of semiconductors.\u003c\/em\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003cp\u003e\u003cfont size=\"4\"\u003eE. F. Schubert (Edited by)\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e9780521017961, Cambridge University Press\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003ePaperback, published 22 August 2005\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003e620 pages, 417 b\/w illus.  20 tables\u003cbr\u003e24.7 x 19 x 3.1 cm, 1.081 kg\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\r\n\r\n\r\n\u003cp align=\"justify\"\u003e\u003cstrong\u003e\u003cfont size=\"3\"\u003eThis book is the first to give a comprehensive review of the theory, fabrication, characterisation, and device applications of abrupt, shallow, and narrow doping profiles in semiconductors. Such doping profiles are a key element in the development of modern semiconductor technology. After an introductory chapter setting out the basic theoretical and experimental concepts involved, the fabrication of abrupt and narrow doping profiles by several different techniques, including epitaxial growth, is discussed. The techniques for characterising doping distributions are then presented, followed by several chapters devoted to the inherent physical properties of narrow doping profiles. The latter part of the book deals with specific devices. The book will be of great interest to graduate students, researchers and engineers in the fields of semiconductor physics and microelectronic engineering.\u003c\/font\u003e\u003c\/strong\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003ePart I: 1. Introduction E. F. Schubert\u003cbr\u003e Part II: 2. Electronic structure of delta-doped semiconductors C. R. Proetto\u003cbr\u003e Part III: 3. Recent progress in delta-like confinement of impurities in GaAs K. H. Ploog\u003cbr\u003e 4. Flow-rate modulation epitaxy (FME) of III-V semiconductors T. Makimoto and Y. Horikoshi\u003cbr\u003e 5. Gas source molecular beam epitaxy (MBE) of delta-doped III-V semiconductors D. Ritter\u003cbr\u003e 6. Solid phase epitaxy for delta-doping in silicon I. Eisele\u003cbr\u003e 7. Low temperature MBE of silicon H.-J. Gossmann\u003cbr\u003e Part IV: 8. Secondary ion mass spectrometry of delta-doped semiconductors H. S. Luftmann\u003cbr\u003e 9. Capacitance-voltage profiling E. F. Schubert\u003cbr\u003e 10. Redistribution of impurities in III-V semiconductors E. F. Schubert\u003cbr\u003e 11. Dopant diffusion and segregation in delta-doped silicon films H.-J. Gossmann\u003cbr\u003e 12. Characterisation of silicon and delta-doped structures in GaAs R. C. Newman\u003cbr\u003e 13. The DX-center in silicon delta-doped GaAs and AlxGa1-xAs P. M. Koenraad\u003cbr\u003e Part V: 14. Luminescence and ellipsometry spectroscopy H. Yao and E. F. Schubert\u003cbr\u003e 15. Photoluminescence and Raman spectroscopy of single delta-doped III-V semiconductor heterostructures J. Wagner and D. Richards\u003cbr\u003e 16. Electron transport in delta-doped quantum wells W. T. Masselink\u003cbr\u003e 17. Electron mobility in delta-doped layers P. M. Koenraad\u003cbr\u003e 18. Hot electrons in delta-doped GaAs M. Asche\u003cbr\u003e 19. Ordered delta-doping R. L. Headrick, L. C. Feldman and B. E. Weir\u003cbr\u003e Part IV: 20. Delta-doped channel III-V field effect transistors (FETs) W.-P. Hong\u003cbr\u003e 21. Selectively doped heterostructure devices E. F. Schubert\u003cbr\u003e 22. Silicon atomic layer doping FET K. Nakagawa and K. Yamaguchi\u003cbr\u003e 23. Planar doped barrier devices R. J. Malik\u003cbr\u003e 24. Silicon interband and intersubband photodetectors I. Eisele\u003cbr\u003e 25. Doping superlattice devices E. F. Schubert.\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\u003cp\u003e\u003cfont size=\"3\"\u003eSubject Areas: Condensed matter physics [\u003ca title=\"See our other books on Condensed matter physics\" href=\"https:\/\/freshlyprintedbooks.co.uk\/search?q=%22Condensed%20matter%20physics%20%5Bliquid%20state%20\u0026amp;%20solid%20state%20physics%5D%20%5BPHFC%5D%22\"\u003eliquid state \u0026amp; solid state physics PHFC\u003c\/a\u003e]\u003c\/font\u003e\u003c\/p\u003e\r\n\r\n\r\n\u003c\/font\u003e","brand":"Cambridge University Press","offers":[{"title":"Default Title","offer_id":46006152200472,"sku":"9780521017961","price":56.69,"currency_code":"GBP","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0730\/2037\/5320\/products\/9780521017961i_c8ea643c-1cbb-4edb-a6fb-a84d347c6f1b.jpg?v=1691376742","url":"https:\/\/freshlyprintedbooks.co.uk\/products\/delta-doping-of-semiconductors-paperback-9780521017961","provider":"Freshly Printed Books","version":"1.0","type":"link"}